FP6 Research Project "NANOSTAR"
Nano-Structured Ferrolectric Films for Tuneable Acoustic Resonators and Devices – "NANOSTAR"
Project No. 016340 (IST-NMP-3)
Duration: 01.09.2005 – 31.08.2008
ETU Project Leader: Prof. Irina Vendik
Development of the theory, fabrication processes and device demonstrators for functional validation of nanostructured multifunctional ferroelectrics films and components integrated with silicon substrate. Tuneable Thin Film Bulk Acoustic Resonators (TFBAR), varactors, and delay lines are typical components.
- The Netherlands
Philips Applied Technologies
St. Petersburg Electrotechnical University
Chalmers University of Technology (Coordinator)
École Polytechnique Fédérale de Lausanne